Is a dry etch profile isotropic, anisotropic or both? What abou... | Filo
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SOLVED: 1. During RIE process, an isotropic etching result is obtained as shown in Fig. 1. To change the process from the isotropic to the anisotropic etching, answer the following problems.1.1 Vacuum pressure; should it be increased or decreased? Describe the reason in brief 1.2 If only CF4 gas is used for the isotropic process, what kind of gases can be added? Describe the reason in brief 1.3 Bias voltage (DC voltage); should it be increased or decreased? Describe the reason in brief. 1.4 Vacu
SOLVED: 1. During RIE process, an isotropic etching result is obtaine…
3 months ago
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